Site Specific TEM Specimen Preparation for Characterization of Extended Defects in 4H-SiC Epilayers
نویسندگان
چکیده
منابع مشابه
TEM specimen preparation techniques
Transmission electron microscopy (TEM) is a powerful tool for the investigation of the microstructure of materials, providing crystallographic information and composition at the nanometer scale. For such studies, samples should be transparent to the electron beam. In this review, TEM sample preparation techniques for different classes of materials, such as metals and alloys, multilayered coatin...
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The structure of the “star” defect in 4H-SiC substrates and its effects on the extended defect structures in the epilayers were studied by molten KOH etching and transmission x-ray topography. Star defects consist of a center region with high densities of threading dislocations (both edge and screw types) and six arms of dislocation arrays extending along <11-20> directions. In addition, multip...
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The annealing behavior of defects observed in electron paramagnetic resonance EPR and photoluminescence PL is discussed. We consider the divacancy the P6/P7 EPR centers and a previously unreported EPR center that we suggest is a VC-VSi-VC trivacancy and their relationship with each other and with the UD1–3 series of PL lines near 1 eV. We observe that the divacancy and the UD2 PL lines annealin...
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The recent development of Dual-BeamTM or Cross-BeamTM FIB systems has gradually taken over the traditional single beam FIB systems. A typical FIB column contains a liquid metal ion source that produces a finely focused Ga ion beam. The primary Ga ion beam is accelerated by 30-50 kV, and directed towards the features of interest on the specimen. The incident ion beam will sputter atoms from the ...
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In this invited talk, I will suggest where we are in our use of TEM for imaging extended defects and guess where we are going. Since the topic of this Symposium concerns advances in imaging and quantification of strain, local atomic structure, and the chemistry of extended defects, the present talk will emphasize the history and development of diffraction contrast methods for the analysis of ex...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2014
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927614003444